Description and target audience – A full day course given in two half days to learn the fundamentals of atomic layer deposition (ALD). The aim is to provide both in-depth mechanistic understanding as well as to provide practical information how to run ALD processes in a laboratory or industrial setting. The target audience are newcomers to the field and engineers/scientists/professionals who want to get a better understanding of the fundamental aspects underlying ALD.
Topics that will be covered include, but will not be limited to: ALD surface chemistry; ALD configurations, processes and materials; precursors and co-reactants for, ALD process design and reactor aspects, nucleation and initial growth during ALD, conformality and uniformity of ALD, etc.
Note that an earlier version of this course was given at Eindhoven University of Technology on May 25, 2024. Please see the reviews on that course here.
Instructors – The course will be given by:
- Prof. Gregory Parsons – North Carolina State University, U.S.A.
- Prof. Seán Barry – Carleton University, Canada
- Prof. Erwin Kessels – Eindhoven University of Technology, Netherlands
Course material – The course material will be provided during the course. Some course material can already be downloaded here:
Program – The program runs from noon-to-noon on June 6 and 7. It consists of 7 lectures with additional time for Q&A and discussion. On the evening of the first day there is a mixer.
The preliminary program schedule is:
June 6, 2024
| 11:30 | 12:45 | Registration & light lunch |
| 12:45 | 13:00 | Welcome and opening |
| 13:00 | 13:45 | 1. Introduction to ALD and its key features |
| 13:45 | 14:30 | 2. ALD processes and applications |
| 14:30 | 15:15 | Afternoon break |
| 15:15 | 16:00 | 3. Precursors and co-reactants for ALD |
| 16:00 | 16:45 | 4. ALD reactors and hardware effects |
| 16:45 | 17:30 | Q&A and discussion |
| 17:30 | 19:00 | Mixer |
June 7, 2024
| 8:30 | 09:00 | Coffee & tea |
| 09:00 | 09:45 | 5. ALD surface chemistry |
| 09:45 | 10:30 | 6. Uniformity and conformality of ALD |
| 10:30 | 11:15 | Morning break |
| 11:15 | 12:00 | 7. Nucleation and initial growth during ALD |
| 12:00 | 12:30 | Q&A and discussion |
| 12:30 | 13:30 | Light lunch & departure |
Venue – The course will take place in building “6 West South” at the campus of the University of Bath in the UK. Click here for a campus map.
Accommodation – The participants are responsible for making their own hotel reservations. Please be advised to make reservations early in advance as affordable options might run out early.
Some hotel suggestions:
Late registration still available – Registration includes participation in the course, a copy of the course notes, coffee/tea and light lunches. Late registration closes May 30, 2024, at noon.
The registration fee depends on whether participants are from academia or industry:
- From industry: £520 (excluding VAT)
- From academia: £260 (excluding VAT)
- BSc/MSc/PhD students*: £130 (excluding VAT)
*The organizers reserve the right to verify the student status
Registration is a two-step process:
Fill in the online form below. Next you will receive an invoice. Registration is only complete when the payment has been received. At that stage, the successful registration will be confirmed.