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Fundamentals of ALD course

Date – 25th of May 2023

Description and target audience – A full day course to learn the fundamentals of atomic layer deposition (ALD). The aim is to provide both in-depth mechanistic understanding as well as to provide practical information how to run ALD processes in a laboratory or industrial setting.  The target audience are newcomers to the field and engineers/scientists/professionals who want to get a better understanding of the fundamental aspects underlying ALD.

Topics that will be covered include the basics of ALD and its key features (thickness control, conformality, uniformity, low temperature); ALD processes (oxides, nitrides, metals, sulfides, etc.); precursors and co-reactants for ALD; ALD process design; ALD configurations and reactors; hardware effects and ALD practicalities;  ALD surface chemistries; nucleation effects and initial growth, etc.

Instructors – The course will be given by:

  • Prof. Gregory Parsons – North Carolina State University, U.S.A.
  • Prof. Séan Barry – Carleton University, Canada
  • Prof. Erwin Kessels – Eindhoven University of Technology, Netherlands

Course material – The course material will be provided during the course. Some course material will be made available for download here (password-protected)

Program – The program runs from 9:00 to 17:00 consists of 7 sessions. The day ends with drinks. A tour to the NanoLab@TU/e clean room and other ALD labs is optional.  

The preliminary program schedule is:

09:0009:15Welcome and opening
09:1510:00Introduction to ALD and its key features
10:0010:45ALD processes and applications
10:4511:15Morning break
11:1512:00Precursors and co-reactants for ALD
12:0013:30Lunch break
13:3014:15ALD reactors and hardware effects
14:1515:00ALD surface chemistry
15:0015:30Afternoon break
15:3016:15Uniformity and conformality of ALD
16:1517:00Nucleation and initial growth during ALD
17:0018:00Drinks (optional: lab tour)

Venue – The courses will take place at the campus of the Eindhoven University of Technology in the theater hall of the Grand Café  De Zwarte Doos (, here you can also find the directions).

Registration – Registration includes participation in the course, a digital copy of the course notes, coffee/tea and sandwich lunches. Registration closes May 16, 2023.

Note: We have a few places left for last-minute registration! You can still register until Tuesday May 23rd.

The registration fee depends on whether participants are from academia or industry:

  • From industry: €500
  • From academia: €250
  • BSc/MSc/PhD students: €125

Registration is a two-step process:

Fill in the online form below.

Transfer the registration fee (free of possible bank charges) to the following bank account while providing the information:

– name(s) of the participant(s)
– organization/company

Bank account information:
IBAN: NL05INGB0003771290
Account owner: Stichting tot Bevordering van de Plasmachemie
City: Nijmegen, The Netherlands

Registration is only complete when both steps have been taken. At that stage, the successful registration will be confirmed.