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Fundamentals of ALD course

Date – 25th of May 2023

Description and target audience – A full day course to learn the fundamentals of atomic layer deposition (ALD). The aim is to provide both in-depth mechanistic understanding as well as to provide practical information how to run ALD processes in a laboratory or industrial setting.  The target audience are newcomers to the field and engineers/scientists/professionals who want to get a better understanding of the fundamental aspects underlying ALD.

Topics that will be covered include the basics of ALD and its key features (thickness control, conformality, uniformity, low temperature); ALD processes (oxides, nitrides, metals, sulfides, etc.); precursors and co-reactants for ALD; ALD process design; ALD configurations and reactors; hardware effects and ALD practicalities;  ALD surface chemistries; nucleation effects and initial growth, etc.

Instructors – The course will be given by:

  • Prof. Gregory Parsons – North Carolina State University, U.S.A.
  • Prof. Séan Barry – Carleton University, Canada
  • Prof. Erwin Kessels – Eindhoven University of Technology, Netherlands

Course material – The course material will be provided during the course. Some course material will be made available for download here (password-protected)

Program – The program runs from 9:00 to 17:00 consists of 7 sessions. The day ends with drinks. A tour to the NanoLab@TU/e clean room and other ALD labs is optional.  

The preliminary program schedule is:

09:0009:15Welcome and opening
09:1510:00Introduction to ALD and its key features
10:0010:45ALD processes and applications
10:4511:15Morning break
11:1512:00Precursors and co-reactants for ALD
12:0013:30Lunch break
13:3014:15ALD reactors and hardware effects
14:1515:00ALD surface chemistry
15:0015:30Afternoon break
15:3016:15Uniformity and conformality of ALD
16:1517:00Nucleation and initial growth during ALD
17:0018:00Drinks (optional: lab tour)

Venue – The courses will take place at the campus of the Eindhoven University of Technology in the theater hall of the Grand Café  De Zwarte Doos (https://www.dezwartedoos.nl/homeeng, here you can also find the directions).

Registration – Registration includes participation in the course, a digital copy of the course notes, coffee/tea and sandwich lunches. Registration closes May 16, 2023.

Note: We have a few places left for last-minute registration! You can still register until Tuesday May 23rd.

The registration fee depends on whether participants are from academia or industry:

  • From industry: €500
  • From academia: €250
  • BSc/MSc/PhD students: €125

Registration is a two-step process:

Fill in the online form below.

Transfer the registration fee (free of possible bank charges) to the following bank account while providing the information:

– name(s) of the participant(s)
– organization/company

Bank account information:
IBAN: NL05INGB0003771290
BIC: INGBNL2A
Account owner: Stichting tot Bevordering van de Plasmachemie
City: Nijmegen, The Netherlands

Registration is only complete when both steps have been taken. At that stage, the successful registration will be confirmed.