On February 15th 2019 an ALD short course was held at the Monteith Research Center on NCSU’s Centennial Campus. The speakers were Prof. Gregory Parsons and Prof. Erwin Kessels. This course was mainly intended for students and postdocs already working on ALD or with having interest to use the ALD equipment at the center for their research. The course started at the introductory level but it included also more advanced topics topics such molecular deposition, energy-enhanced ALD and ALD reactor designs.
Responses to the course:
Students Postdocs Professionals22 75.9% 5 17.2% 2 6.9%
4.6 out of 5.0 stars The course was well presented by the speakers
4.4 out of 5.0 stars The course met my expectations
4.2 out of 5.0 stars The course provided useful skills
4.4 out of 5.0 stars The course was well setup
4.4 out of 5.0 starsI would recommend the course to others
A few quotes:
“Each speaker was easy to understand and conveyed the material well”
“This course has been very exciting! I now have many useful resources for my ALD needs.”
“Appreciate focus on experimental design”
“The questions caused us to get behind, but I didn’t mind because I learned a lot from the discussions!”
“Some sections felt rushed. I learned a lot about ALD”
Program
| 8.45 – 9.00 | Welcome and introduction to the ALD Academy |
| 9.00 – 10.15 | Introduction to ALD & prototypical Al2O3 case |
| 10.15 – 10.45 | Morning break |
| 10.45 – 12.00 | Dielectrics, Metals and MLD Organics |
| 12.00 – 12.30 | Presentation about NNF facility |
| 12.30 – 13.30 | Lunch break |
| 13.30 – 14.45 | Energy-enhanced ALD including plasma-enhanced ALD |
| 14.45 – 15.15 | Afternoon break |
| 15.15 – 16.30 | ALD reactors |
| 16.30 – 17.00 | Discussion / additional topics |
| 17.00 – 17.15 | Wrap up and closing |