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ALD course – North Carolina State University

On February 15th 2019 an ALD short course was held at the Monteith Research Center on NCSU’s Centennial Campus. The speakers were Prof. Gregory Parsons and Prof. Erwin Kessels. This course was mainly intended for students and postdocs already working on ALD or with having interest to use the ALD equipment at the center for their research. The course started at the introductory level but it included also more advanced topics topics such molecular deposition, energy-enhanced ALD and ALD reactor designs.

Responses to the course:







4.6 out of 5.0 stars The course was well presented by the speakers
4.4 out of 5.0 stars The course met my expectations
4.2 out of 5.0 stars The course provided useful skills
4.4 out of 5.0 stars The course was well setup
4.4 out of 5.0 starsI would recommend the course to others

A few quotes:

“Each speaker was easy to understand and conveyed the material well”
“This course has been very exciting! I now have many useful resources for my ALD needs.”
“Appreciate focus on experimental design”
“The questions caused us to get behind, but I didn’t mind because I learned a lot from the discussions!”
“Some sections felt rushed. I learned a lot about ALD”


8.45 – 9.00Welcome and introduction to the ALD Academy
9.00 – 10.15Introduction to ALD & prototypical Al2O3 case
10.15 – 10.45Morning break
10.45 – 12.00Dielectrics, Metals and MLD Organics
12.00 – 12.30Presentation about NNF facility
12.30 – 13.30Lunch break
13.30 – 14.45Energy-enhanced ALD including plasma-enhanced ALD
14.45 – 15.15Afternoon break
15.15 – 16.30ALD reactors
16.30 – 17.00Discussion / additional topics
17.00 – 17.15Wrap up and closing

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